Integrating carbon nanotubes (CNTs) and nanowires into devices for sensing, actuation and other nanoelectronic applications has the potential to increase device efficiency and lower power consumption. Examples include ultra-high frequency CNT filters and resonators for high sensitivity gas/mass detection. Reliable operation requires careful mechanical and electrical characterization of the integrated CNTs and their contact with electrodes. In this work, we demonstrate a fabrication strategy and integration of suspended single walled CNTs (SWCNTs) on a chip for investigation of the metal nanotube interfacial adhesion strength. A multi-step etching process is used to prepare SWCNTs integrated on TEM compatible chips. Alternating current (AC) dielectrophoresis (DEP) is used for selective SWCNT integration simultaneously overcoming localization issues. The suspended tubes are conducive to mechanical manipulation or electrostatic actuation. In addition, our approach provides fully suspended electrodes for TEM analysis with reduced charging issues that are typically caused by supporting insulating layers. This enables the visualization of failure modes of the tube/electrode contact that have not been previously observed.
Fabricating Devices with Dielectrophoretically Assembled, Suspended Single Walled Carbon Nanotubes for Improved Nanoelectronic Device Characterization
